Templates

11-22 semi-polar GaN templates are available in 2" diameter or custom sizes (quarters, 10mm x 10mm etc). Contact us for 4” and 6” enquiries.

Basic Specification

Semi-polar (11-22) Non-polar (11-20)
Wafer diameter 2"4" 2"
Substrate m-plane sapphire m-plane sapphirer-plane sapphire
Substrate thickness (µm) 425 ± 30425 ± 30 330 ± 30
425 ± 30
Conduction type nominally n-type nominally n-typenominally n-type
XRD @ 0° (along 1-100) ~370 arc sec~370 arc sec ~440 arc sec
XRD @ 90° (along 11-2-3) ~370 arc sec~370 arc sec ~350 arc sec
Wafer curvature <20µm<30µm <1° / µm
Total GaN layer thickness <5µm <5µm<5µm
Front surface finish MOCVD as-grown MOCVD as-grown MOCVD as-grown
AFM (1µm x 1µm) 1.5nm1.5nm 1.5nm

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